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Display Panels

Display panel thin film coating metrology — OLED emissive layers, IGZO TFT and touch TCO coatings.

Focus Areas

Key process windows

1

OLED Emissive

Organic emissive 20–80 nm — efficiency & color.

2

TFT Active Layer

a-IGZO 30–100 nm — switching consistency.

3

Touch TCO

ITO 20–150 nm — resistance vs transmittance.

Metrology Table

Process · Film · Range · Value

Sub-scenario / ProcessFilm LayerThickness RangeApplication & Metrology Value
OLED Emissive Layer DepositionOrganic emissive material film20 nm – 80 nmLuminous efficiency, color coordinates and device lifetime
TFT Active Layer (IGZO)a-IGZO film30 nm – 100 nmSwitching characteristics and panel pixel-to-pixel consistency
Touch Sensor TCO CoatingITO film20 nm – 150 nmBalances sheet resistance and optical transmittance
OLED Emissive Layer Deposition
Organic emissive material film · 20 nm – 80 nm

Luminous efficiency, color coordinates and device lifetime

TFT Active Layer (IGZO)
a-IGZO film · 30 nm – 100 nm

Switching characteristics and panel pixel-to-pixel consistency

Touch Sensor TCO Coating
ITO film · 20 nm – 150 nm

Balances sheet resistance and optical transmittance

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